Keywords: Oxygen Plasma Cleaning.JPG en The surface of a MEMS device is cleaned with bright blue Oxygen Plasma in a Plasma Etcher to rid it of carbon contaminants 100mTorr 50W RF own Maxfisch 2010-07-15 Maboudian Lab UC Berkeley Scientific equipment Scientific instruments Plasmas Oxygen MEMS Blue Clamps with screws laboratory equipment cc-zero |